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Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

Materials ScienceElectrical EngineeringEngineeringPiezoresistive Mems SensorsPiezoelectric NanogeneratorsApplied PhysicsHigh TemperaturesPiezoelectricityPiezoelectric MaterialThin Film Process TechnologyThin FilmsMicroelectronicsMicro-electromechanical System