Large area high density quantized magnetic disks fabricated using nanoimprint lithography

Abstract

A new low-cost, high throughput method was developed for fabricating large area quantized magnetic disks (QMDs) using nanoimprint lithography (NIL), electroplating, and chemical mechanical polishing. Perpendicular QMDs with a density of 18 Gbit/in.2 and good uniformity over an area of 4 cm×4 cm (total 45 Gbit) have been achieved, as well as longitudinal QMDs of 30 Gbit/in.2 The NIL molds for the perpendicular QMDs were fabricated using double NIL with a grating mold. The magnetic properties of both types of QMDs were studied by magnetic force microscopy.