Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

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High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

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The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering

Ki Cheol Park, Dae Young, Kun Ho Kim · Thin Solid Films · 1997 · 339 citations

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