Publication | Closed Access
High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning
26
Citations
23
References
2013
Year
Materials ScienceEngineeringPolymeric Uv-nano-imprint MoldsNanomaterialsMicrofabricationPolymer ScienceNanostructured PolymerMolecular ImprintingPolymer ChemistryMolding (Process)Nanolithography Method
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