Studies of cobalt thin films deposited by sputtering and MOCVD

Vapor Deposition

C. F. Powell, J. H. Oxley, J. M. Blocher et al. · Journal of The Electrochemical Society · 1966 · 104 citations

Bulk versus Surface Transport of Nickel and Cobalt on Silicon

M. Y. Lee, P. A. Bennett · Physical Review Letters · 1995 · 68 citations

Materials Science, Surface Characterization, Engineering +13

Nucleation and growth of CoSi2 on Si(100) studied by scanning tunneling microscopy

V. Scheuch, Bert Voigtländer, H.P. Bonzel · Surface Science · 1997 · 66 citations

Engineering, Tunneling Microscopy, Surface Science +6

Dissociation of dilute immiscible copper alloy thin films

Katayun Barmak, G. Lucadamo, C. Cabral et al. · Journal of Applied Physics · 2000 · 53 citations

Materials Science, Materials Engineering, Engineering +14

Organometallic chemical vapor deposition of cobalt and formation of cobalt disilicide

M. E. Gross, K. S. Kranz, D. Brasen et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 48 citations

Materials Science, Inorganic Chemistry, Gaseous Reduction +12