Concepedia

The Diamond-NOM: A non-contact profiler capable of characterizing optical figure error with sub-nanometre repeatability

Simon G. Alcock, Kawal Sawhney, S M Scott, U. Pedersen, Rob Walton, Frank Siewert, Thomas Zeschke, F. Senf, Tino Noll, Heiner Lammert

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 154 citations · 6 references

DOI

Concepts

References

6

The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY

Frank Siewert · AIP conference proceedings · 2004 · 156 citations

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Ion beam figuring for lithography optics

M. Weiser · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 131 citations

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Multi-segmented piezoelectric mirrors as active/adaptive optics components

Riccardo Signorato, O. Hignette, J. Goulon · Journal of Synchrotron Radiation · 1998 · 103 citations · Full text

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The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prisma)

Shinan Qian, W. Jark, Peter Z. Takacs · Review of Scientific Instruments · 1995 · 103 citations

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Focusing mirror for x-ray free-electron lasers

Hidekazu Mimura, Shinya Morita, Takashi Kimura et al. · Review of Scientific Instruments · 2008 · 60 citations

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