AIP conference proceedings · 2004 · 154 citations · 0 references
Optical MaterialsEngineeringMicroscopyMeasurementOptic DesignOptical TestingOptical MetrologyEducationSynchrotron Radiation BeamlinesLaser FabricationX-ray FluorescenceOptical PropertiesCalibrationPhotonic MetrologyInstrumentationNanometer Optical ComponentPhysicsLength MetrologyX-ray OpticsSurface FinishingTime MetrologyQuality MetricsOptical TolerancingOptical ComponentsSurface FigureOrganic PhotonicsInstrument ScienceScanning Probe MicroscopyApplied PhysicsX-ray Optic
The NOM was developed at BESSY to measure the surface figure of grazing‑incidence optical components up to 1.2 m long used in synchrotron beamlines. It obtains slope, height, and curvature data through line‑scan acquisition and 3‑D display, and its engineering design and initial measurements are detailed. Measurements of up to 600 cm² achieve an estimated 0.01 arcsec rms uncertainty and high reproducibility, representing a five‑to‑tenfold improvement over current surface‑metrology techniques.
The Nanometer Optical Component measuring Machine (NOM) has been developed at BESSY for the purpose of measuring the surface figure of optical components up to 1.2 m in length used at grazing incidence in Synchrotron Radiation beamlines. It is possible to acquire information about slope and height deviations and the radius of curvature of a sample in the form of line‐scans and in a three dimensional display format. With the NOM surfaces up to 600 cm2 have been measured with an estimated measuring uncertainty in the range of 0.01 arcsec rms and with a correspondingly high reproducibility. This is a five to tenfold improvement compared to the present state of the art of surface measuring techniques. The engineering conception, the design of the NOM and the first measurements are discussed in detail.