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Role of grains in protocrystalline silicon layers grown at very low substrate temperatures and studied by atomic force microscopy

Materials ScienceAtomic Force MicroscopyEngineeringPhysicsMicroscopyMicrofabricationScanning Probe MicroscopySurface ScienceApplied PhysicsScanning Force MicroscopyLow Substrate TemperaturesNanometrologyNanoscale ScienceProtocrystalline Silicon LayersSilicon On InsulatorMicrostructure