Concepedia

Publication | Closed Access

Interstitial trapping efficiency of C+ implanted into preamorphised silicon — control of EOR defects

DOI

24

Citations

12

References

1997

Year

F. Cristiano, Caroline Bonafos, A. Nejim, S. Lombardo, M. Omri, Daniel Alquier, A. Martínez, S. U. Campisano, P.L.F. Hemment, A. Claverie
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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