Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation

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Engineering, Electrical Engineering, Materials Science +17

Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles

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Inline capacitive and DC-contact MEMS shunt switches

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Engineering, Electrical Engineering, Microelectromechanical Systems +14

Preparation and Application of Lead Zirconate Titanate (PZT) Films Deposited by Hybrid Process: Sol-Gel Method and Laser Ablation

Jiunnjye Tsaur, Zhan Jie Wang, Lulu Zhang et al. · Japanese Journal of Applied Physics · 2002 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17

Surface-micromachined electrostatic microrelay

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