The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control

Run by run process control: combining SPC and feedback control

Emanuel M. Sachs, Ármann Ingólfsson · IEEE Transactions on Semiconductor Manufacturing · 1995 · 318 citations

Engineering, Process Instrumentation, Run Process Control +21

Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry

Stephanie Watts Butler, Jerry A. Stefani · IEEE Transactions on Semiconductor Manufacturing · 1994 · 224 citations

Supervisory Run-to-run Control, Engineering, Process Instrumentation +14

Run-to-Run Control in Semiconductor Manufacturing

David Drain · Journal of Quality Technology · 2002 · 98 citations

Engineering, Semiconductor Manufacturing, Process Control +6

Long run and transient analysis of a double EWMA feedback controller

Enrique Del Castillo · IIE Transactions · 1999 · 82 citations

Engineering, Transient Analysis, Industrial Engineering +22

Just-in-Time Adaptive Disturbance Estimation for Run-to-Run Control of Semiconductor Processes

Stacy Firth, W.J. Campbell, Anthony J. Toprac et al. · IEEE Transactions on Semiconductor Manufacturing · 2006 · 75 citations

Control Method, Semiconductor Processes, Engineering +15