Concepedia

W.J. Campbell

WC

5

Publications

383

Citations

5

H-Index

1997

Active since

Affiliations

The University of Texas at Austin(Current)

Advanced Micro Devices (United States)

W.J. Campbell is an author at The University of Texas at Austin specializing in systems engineering, process control, and engineering.

Top concepts

EngineeringProcess ControlSystems EngineeringComputer EngineeringIndustrial EngineeringBusinessProduction ControlModel Predictive ControlAutomationMechatronics

Publications per year

1997–2006

5

Publications

5

Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

Thomas F. Edgar, Stephanie Watts Butler, W.J. Campbell et al. · Automatica · 2000 · 205 citations

Engineering, Automation, Process Control +4

Just-in-Time Adaptive Disturbance Estimation for Run-to-Run Control of Semiconductor Processes

Stacy Firth, W.J. Campbell, Anthony J. Toprac et al. · IEEE Transactions on Semiconductor Manufacturing · 2006 · 75 citations

Control Method, Semiconductor Processes, Engineering +15

A comparison of run-to-run control algorithms

W.J. Campbell, Stacy Firth, Anthony J. Toprac et al. · 2002 · 63 citations

Engineering, Industrial Engineering, Systems Engineering +19

Model-based control in microelectronics manufacturing

Thomas F. Edgar, W.J. Campbell, Christopher Bode · 2003 · 25 citations

Engineering, Industrial Engineering, Model-based Control Technique +13

<title>Evaluation of model predictive control in run-to-run processing in semiconductor manufacturing</title>

James A. Mullins, W.J. Campbell, Allen D. Stock · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 15 citations

Engineering, Industrial Engineering, Ewma Filter +21

Rows per page

1–5 of 5