2002 · 63 citations · 22 references
EngineeringIndustrial EngineeringSystems EngineeringModel Predictive ControlParallel ComputingRun-to-run ControlControl AlgorithmsControl StrategyBatch Process ControlModel-based Control TechniqueComputer EngineeringPlant-wide ControlRuntime SystemControl ArchitectureEnergy ManagementAutomationProcess ControlBusinessRun-to-run Control AlgorithmsIndustrial InformaticsIndustrial Process ControlControl Structure
Run-to-run control is the term used for the application of batch process control as practiced in the semiconductor industry. This paper gives a brief introduction to the fundamental parts of a run-to-run control algorithm and surveys several of the popular techniques for the application of this control methodology. In particular, model predictive control is explored as a robust and flexible technique for implementing run-to-run control.
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