Concepedia

Publication | Closed Access

32nm node BEOL integration with an extreme low-k porous SiOCH dielectric k=2.3

DOI

16

Citations

1

References

2009

Year

K. Hamioud, V. Arnal, A. Farcy, V. Jousseaume, A. Zenasni, B. Icard, Jonathan Pradelles, S. Manakli, P. Brun, G. Imbert,
Microelectronic Engineering

References

YearCitations

Page 1