Concepedia

Selective deposition of CVD iron on silicon dioxide and tungsten

Yee Low, M.F. Bain, Daniel C. S. Bien, J.H. Montgomery, B.M. Armstrong, H.S. Gamble

Microelectronic Engineering · 2006 · 16 citations · 7 references

DOI

Concepts

References

7

Chemical vapor deposition of metals: Part 1. An overview of CVD processes

Mark J. Hampden‐Smith, Toivo T. Kodas · Chemical Vapor Deposition · 1995 · 192 citations

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Catalytic growth rate enhancement of electron beam deposited iron films

Roderick R. Kunz, T. M. Mayer · Applied Physics Letters · 1987 · 61 citations

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Selective area growth of metal nanostructures

D. P. Adams, Thomas Mayer, B. S. Swartzentruber · Applied Physics Letters · 1996 · 55 citations

, , +15

Deposition of metal films by the controlled decomposition of organometallic compounds on surfaces

Patricia M. George, J. L. Beauchamp · Thin Solid Films · 1980 · 47 citations

, , +16

Epitaxial growth of Fe on GaAs by metalorganic chemical vapor deposition in ultrahigh vacuum

R. Kaplan, N. Bottka · Applied Physics Letters · 1982 · 38 citations

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