Selective deposition of CVD iron on silicon dioxide and tungsten - Concepedia

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Selective deposition of CVD iron on silicon dioxide and tungsten

16

Citations

7

References

2006

Year

Yee Low, M.F. Bain, Daniel C. S. Bien, J.H. Montgomery, B.M. Armstrong, H.S. Gamble

Microelectronic Engineering

Materials ScienceCvd IronEngineeringCorrosionSurface ScienceApplied PhysicsVacuum DeviceChemical DepositionSilicon On InsulatorPlasma ProcessingChemical Vapor Deposition

References

	Year	Citations

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