Publication | Closed Access
The adsorption and thermal decomposition of trimethylaluminium and dimethylaluminium hydride on GaAs(100)
22
Citations
22
References
1995
Year
SemiconductorsChemical EngineeringEngineeringApplied PhysicsThermal DecompositionDimethylaluminium HydrideChemistryCompound Semiconductor
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