Microelectronic Engineering · 2007 · 70 citations · 8 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsCmos Circuit DesignComplementary Metal-oxide-semiconductor TechnologyDielectricsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsCmos Fabrication ProcessesGate Dielectric EngineeringGate DielectricsGate Oxide Thickness EffectsGate Oxides
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Field-effect transistors with SrHfO3 as gate oxide
C. Rossel, B. Mereu, Chiara Marchiori et al. · Applied Physics Letters · 2006 · 100 citations