Thin Solid Films · 2010 · 88 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsSemiconductor MaterialsThin FilmsOptical Thin FilmsSemiconductor PhysicsSilicon MaterialsThin Film AnnealingThin Film Optical PropertiesThin-film MaterialsAnnealing Temperature EffectsAnnealing Time EffectsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide CeramicsThermal AnnealingTransformations
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