Large area crystallization of amorphous Si with overlapping high repetition rate laser pulses

Melting Temperature and Explosive Crystallization of Amorphous Silicon during Pulsed Laser Irradiation

Michael O. Thompson, G. J. Galvin, J. W. Mayer et al. · Physical Review Letters · 1984 · 566 citations

Materials Science, Engineering, Energy Densities +12

Phase transformation mechanisms involved in excimer laser crystallization of amorphous silicon films

James S. Im, Hyun Jae Kim, Michael O. Thompson · Applied Physics Letters · 1993 · 528 citations

Materials Engineering, Materials Science, Epitaxial Growth +15

XeCl Excimer Laser Annealing Used to Fabricate Poly-Si TFT's

Toshiyuki Sameshima, Masaki Hara, S. Usui · Japanese Journal of Applied Physics · 1989 · 198 citations

Engineering, Poly-si Tft, Fabricate Poly-si Tft +19

Excimer laser-induced temperature field in melting and resolidification of silicon thin films

Mutsuko Hatano, Seung Jae Moon, Minghong Lee et al. · Journal of Applied Physics · 2000 · 180 citations

Optical Materials, Engineering, Crystal Growth Technology +21

Microprocessing of ITO and a-Si thin films using ns laser sources

C. Molpeceres, S. Lauzurica, J.J. Gandı́a et al. · Journal of Micromechanics and Microengineering · 2005 · 73 citations

Optical Materials, Engineering, Laser Applications +25