Electron-beam assisted physical vapor deposition of polycrystalline silicon films

Scherrer after sixty years: A survey and some new results in the determination of crystallite size

J. I. Langford, A. J. C. Wilson · Journal of Applied Crystallography · 1978 · 3.8K citations

Natural Sciences, Materials Science, Crystal Structure +14

The physics of semiconductor devices

H. L. Grubin · IEEE Journal of Quantum Electronics · 1979 · 2.8K citations

Engineering, Materials Science, Physics +12

Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing

D Maier-Schneider, Julia Maibach, Dieter Schneider · Journal of Micromechanics and Microengineering · 1995 · 104 citations

Natural Sciences, Materials Engineering, Materials Science +17

STUDY OF THE EARLY STAGES OF THE EPITAXY OF SILICON ON SILICON

F. Jona · Applied Physics Letters · 1966 · 53 citations

Natural Sciences, Materials Science, Physics +17

Polycrystalline-silicon thin-film transistors on glass

Makoto Matsui, Y. Shiraki, Yoshifumi Katayama et al. · Applied Physics Letters · 1980 · 36 citations

Engineering, Electrical Engineering, Materials Science +17