Concepedia

Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

Srinivasan Guruvenket, G. Mohan Rao

Materials Science and Engineering B · 2003 · 31 citations · 13 references

DOI

Concepts

References

13

Unbalanced dc magnetrons as sources of high ion fluxes

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 208 citations

, , +15

Composition, residual stress, and structural properties of thin tungsten nitride films deposited by reactive magnetron sputtering

Y.G. Shen, David R. McKenzie, Q. C. Zhang et al. · Journal of Applied Physics · 2000 · 111 citations

, , +17

Performance of W100−xNx diffusion barriers between 〈Si〉 and Cu

P.J. Pokela, Chee‐Kin Kwok, E. Kolawa et al. · Applied Surface Science · 1991 · 67 citations

, , +8

Properties of reactively sputtered WN x as Cu diffusion barrier

Bong-Seok Suh, Yoon-Jik Lee, Jeongsug Hwang et al. · Thin Solid Films · 1999 · 57 citations

, , +13

WNx: Properties and applications

Frank C. T. So, Elzbieta Kolawa, Xin-An Zhao et al. · Thin Solid Films · 1987 · 47 citations

, , +2