Concepedia

Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon

D. Resnik, D. Vrtačnik, U. Aljančič, M. Možek, S. Amon

Microelectronics Journal · 2003 · 27 citations · 3 references

References

3

Micromachined silicon sensors for scanning force microscopy

Olaf Wolter, Thomas Bayer, J. Greschner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 294 citations

Engineering, Materials Engineering, Materials Science +17

Integrated electrostatically resonant scan tip for an atomic force microscope

Lingjiang Kong, B. G. Orr, K.D. Wise · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 22 citations

Engineering, Bioengineering, Microelectromechanical Systems +14

Field emission arrays by silicon micromachining

T. Dębski, B. Volland, W. Barth et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 12 citations · Full text

Engineering, Electrical Engineering, Materials Science +17