U. Aljančič

The role of Triton surfactant in anisotropic etching of {1 1 0} reflective planes on (1 0 0) silicon

D. Resnik, D. Vrtačnik, U. Aljančič et al. · Journal of Micromechanics and Microengineering · 2005 · 102 citations

Optical Materials, Engineering, Micro-optical Component +20

Analysis of the influence of nitrogen phase and surface heat transfer coefficient on cryogenic machining performance

Franci Pušavec, Tao Lü, C. Courbon et al. · Journal of Materials Processing Technology · 2016 · 82 citations

Materials Science, Engineering, Material Machining +10

Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon

D. Resnik, D. Vrtačnik, U. Aljančič et al. · Microelectronics Journal · 2003 · 27 citations

Mechanical stress in thin film microstructures on silicon substrate

D. Resnik, U. Aljančič, D. Vrtačnik et al. · Vacuum · 2005 · 21 citations

Engineering, Microfabrication, Mechanical Engineering +9

Effective roughness reduction of  100  and  311  planes in anisotropic etching of  100  silicon in 5  TMAH

D. Resnik, D. Vrtačnik, U. Aljančič et al. · Journal of Micromechanics and Microengineering · 2002 · 21 citations

Engineering, Silicon On Insulator, Wet Anisotropic Etching +17