Mechanical stress in thin film microstructures on silicon substrate - Concepedia

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Mechanical stress in thin film microstructures on silicon substrate

21

Citations

5

References

2005

Year

D. Resnik, U. Aljančič, D. Vrtačnik, M. Možek, S. Amon

EngineeringMicrofabricationMechanical EngineeringApplied PhysicsStressstrain AnalysisSolid MechanicsThin FilmsSilicon On InsulatorMechanical StressMechanics Of MaterialsMicrostructureHigh Strain Rate

References

	Year	Citations

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