SOI rate gyro sensor for automotive control

Electrostatic correction of structural imperfections present in a microring gyroscope

Barry J. Gallacher, John Hedley, J.S. Burdess et al. · Journal of Microelectromechanical Systems · 2005 · 166 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes

A. Gaißer, W. Geiger, T. Link et al. · Sensors and Actuators A Physical · 2002 · 29 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Quartz rate gyro sensor for automotive control

Yutaka Nonomura, Motohiro Fujiyoshi, Y. Omura et al. · Sensors and Actuators A Physical · 2003 · 23 citations

Engineering, Automotive Engineering, Mechatronics Engineering +14

A new processing technique to prevent stiction using silicon selective etching for SOI-MEMS

Norio Fujitsuka, Jiro Sakata · Sensors and Actuators A Physical · 2002 · 21 citations

Engineering, Electrical Engineering, Materials Science +14