New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes

Certain Topics in Telegraph Transmission Theory

H. Nyquist · Transactions of the American Institute of Electrical Engineers · 1928 · 3K citations

Electrical Engineering, Telegraph Transmission Theory, Engineering +11

A surface micromachined silicon accelerometer with on-chip detection circuitry

Wolfgang Kuehnel, Steven Sherman · Sensors and Actuators A Physical · 1994 · 232 citations

Electrical Engineering, Engineering, Accelerometer +5

New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

W. Geiger, B. Folkmer, Udo Sobe et al. · Sensors and Actuators A Physical · 1998 · 48 citations

Decoupled Oscillation Modes, New Designs, Vibrations +12

The silicon angular rate sensor system DAVED®

W. Geiger, Jürgen Merz, T. Fischer et al. · Sensors and Actuators A Physical · 2000 · 28 citations

Electrical Engineering, Engineering, Sensors +6