Publication | Closed Access
New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes
29
Citations
4
References
2002
Year
Capacitive SensorsEngineeringSensorsMicrofabricationCalibrationGyroscopeSensor DesignInstrumentationMicro-machined GyroscopesMicro-electromechanical SystemSensor TechnologyMagnetic Sensor
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