Motohiro Fujiyoshi

Design and dextrous control of micromanipulator with 6 DOF

Toshio Fukuda, Motohiro Fujiyoshi, Fumihito Arai et al. · 2002 · 35 citations

Engineering, Mechanical Engineering, Robotics Engineering +15

Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection

Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama et al. · Sensors and Actuators A Physical · 2012 · 31 citations

Engineering, Electrical Engineering, Robotics Engineering +17

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama et al. · Sensors and Actuators A Physical · 2018 · 31 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

Quartz rate gyro sensor for automotive control

Yutaka Nonomura, Motohiro Fujiyoshi, Y. Omura et al. · Sensors and Actuators A Physical · 2003 · 23 citations

Engineering, Automotive Engineering, Mechatronics Engineering +14

Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI

Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama et al. · Journal of Micromechanics and Microengineering · 2011 · 19 citations

Engineering, Materials Engineering, Materials Science +17