Masanori Muroyama

3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer

Sho Asano, Masanori Muroyama, Takahiro Nakayama et al. · Sensors · 2017 · 36 citations · Full text

Engineering, Materials Science, Ceramics +16

Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode selectable function for individual operation of 400 electrodes

Kumi Y. Inoue, Masahki Matsudaira, Masanori Nakano et al. · Lab on a Chip · 2014 · 34 citations

Engineering, Bioengineering, Biomedical Engineering +17

Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection

Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama et al. · Sensors and Actuators A Physical · 2012 · 31 citations

Engineering, Electrical Engineering, Robotics Engineering +17

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama et al. · Sensors and Actuators A Physical · 2018 · 31 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

Design and Fabrication Technology of Low Profile Tactile Sensor with Digital Interface for Whole Body Robot Skin

Mitsutoshi Makihata, Masanori Muroyama, Shuji Tanaka et al. · Sensors · 2018 · 25 citations · Full text

Engineering, Mechanical Engineering, Robotics Engineering +17