Concepedia

Publication | Closed Access

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

DOI

30

Citations

21

References

2018

Year

Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama, Takahiro Nakayama, Yutaka Nonomura, Rakesh Chand, Hideki Hirano, Y. Omura, Motohiro Fujiyoshi, Shuji Tanaka
Sensors and Actuators A Physical

References

YearCitations

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