Publication | Closed Access
Ultrathin SiO2 film growth on Si by highly concentrated ozone
38
Citations
21
References
2000
Year
Chemical EngineeringEngineeringOxide ElectronicsSurface ScienceApplied PhysicsSilicon On InsulatorEpitaxial GrowthConcentrated OzoneChemical Vapor DepositionThin Film Processing
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