Concepedia

Ultrathin SiO2 film growth on Si by highly concentrated ozone

Shingo Ichimura, Akira Kurokawa, Ken Nakamura, Hiroshi Itoh, Hidehiko Nonaka, Kazuto Koike

Thin Solid Films · 2000 · 38 citations · 21 references

DOI

Concepts

References

21

The electronic structure at the atomic scale of ultrathin gate oxides

David A. Muller, T. Sorsch, S. Moccio et al. · Nature · 1999 · 961 citations

, , +16

Calculations of electron inelastic mean free paths for 31 materials

Shigeo Tanuma, C. J. Powell, David R. Penn · Surface and Interface Analysis · 1988 · 937 citations

, , +13

Kinetics of Initial Layer-by-Layer Oxidation of Si(001) Surfaces

Heiji Watanabe, Koichi Kato, Tsuyoshi Uda et al. · Physical Review Letters · 1998 · 288 citations

, , +17

Film thickness measurements of SiO <sub>2</sub> by XPS

D. F. Mitchell, K. B. Clark, J. A. Bardwell et al. · Surface and Interface Analysis · 1994 · 163 citations

, , +16

SiO2/Si(100) interface studied by Al <i>K</i>α x-ray and synchrotron radiation photoelectron spectroscopy

Zhaoming Lu, M. J. Graham, Dawei Jiang et al. · Applied Physics Letters · 1993 · 152 citations

, , +14