Statistics
Publications
38
Citations
900
H-Index
19
Active since
1988
Hidehiko Nonaka is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, applied physics, and chemistry.
Publications per year
1988–2016
38
38
Evaluation of new ozone generator designed for oxide film formation by molecular beam epitaxy method
Shingo Ichimura, Shunsuke Hosokawa, Hidehiko Nonaka et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 39 citations
Materials Science, Materials Engineering, Chemical Engineering +12
Ultrathin SiO2 film growth on Si by highly concentrated ozone
Shingo Ichimura, Akira Kurokawa, Ken Nakamura et al. · Thin Solid Films · 2000 · 38 citations
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