Recent progress in low temperature nanoimprint lithography

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Porous Polymer, Polymers +20

Macromol. Rapid Commun. 2/2010

Amar B. Pawar, Ilona Kretzschmar · Macromolecular Rapid Communications · 2010 · 490 citations

Pattern Formation, Engineering, Patchy Particles +10

Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure

Hsuen‐Li Chen, S. Y. Chuang, Hao Cheng et al. · Microelectronic Engineering · 2006 · 65 citations

Materials Science, Engineering, Nanoimprint Lithography +13

Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography

Fang Jiao, Qiyu Huang, Wangchun Ren et al. · Microelectronic Engineering · 2012 · 54 citations

Materials Science, Chemical Engineering, Engineering +14

Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography

Alborz Amirsadeghi, Jaejong Lee, Sunggook Park · Applied Surface Science · 2011 · 53 citations

Materials Science, Engineering, Beam Lithography +13