Publication | Closed Access
Deposition of phosphorus doped microcrystalline silicon below 70 °C at 70 MHz
45
Citations
2
References
1991
Year
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringMicrofabricationApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationPhosphoreneMicroelectronicsChemical Vapor Deposition
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