Statistics
Publications
79
Citations
2.5K
H-Index
28
Active since
1967
Affiliations
Masataka Hirose is an author at Hiroshima University specializing in materials science, natural sciences, and semiconductor materials.
Publications per year
1967–2017
79
79
Atomic Layer Controlled Digital Etching of Silicon
Hiroyuki Sakaue, Seiji Iseda, Kazushi Asami et al. · Japanese Journal of Applied Physics · 1990 · 86 citations
1–5 of 79