Statistics
Publications
3
Citations
173
H-Index
3
Active since
1990
Affiliations
Hiroshima University(Current)
Seiji Iseda is an author at Hiroshima University specializing in materials engineering, surface science, and materials science.
Publications per year
1990–2007
3
3
Atomic Layer Controlled Digital Etching of Silicon
Hiroyuki Sakaue, Seiji Iseda, Kazushi Asami et al. · Japanese Journal of Applied Physics · 1990 · 86 citations
Digital chemical vapor deposition and etching technologies for semiconductor processing
Y. Horiike, Tomoko Tanaka, Masatake Nakano et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 68 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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