Masatake Nakano - Concepedia

Author

Masatake Nakano

Also Known As

M. Nakano, Masatake Nakano, Masatake Nakano Masatake Nakano

Publications

151

Citations

H-Index

Concepts

All Affiliations

Masatake Nakano is an author at Hiroshima University specializing in engineering, applied physics, and electronic packaging.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	98
2	Applied Physics	3	3	98
3	Chemical Engineering	2	2	81
4	Electrical Engineering	1	1	68
5	Materials Engineering	1	1	13

Masatake Nakano

Publications

Citations

H-Index

Page 1

	Year	Citations
Digital chemical vapor deposition and etching technologies for semiconductor processing Y. Horiike, Tomoko Tanaka, Masatake Nakano, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringDigital EtchingSemiconductor ProcessingIntegrated CircuitsChemical Deposition	1990	68
Silicon Wafer-Bonding Process Technology for SOI Structures Tomoyuki Abe, Masatake Nakano, T. Itho, Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationSoi Structures	1990	17
Digital chemical vapor deposition of SiO2 Masatake Nakano, Hiroyuki Sakaue, Hayami Kawamoto, Applied Physics Letters Materials EngineeringSio2 FilmChemical EngineeringEngineeringSilicon Deposition	1990	13

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