Concepedia

Masatake Nakano

MN

3

Publications

98

Citations

3

H-Index

1990

Active since

Affiliations

Hiroshima University(Current)

Masatake Nakano is an author at Hiroshima University specializing in engineering, applied physics, and electronic packaging.

Top concepts

Publications per year

1990–1990

3

Publications

3

Digital chemical vapor deposition and etching technologies for semiconductor processing

Y. Horiike, Tomoko Tanaka, Masatake Nakano et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 68 citations · Full text

, , +19

Silicon Wafer-Bonding Process Technology for SOI Structures

Tomoyuki Abe, Masatake Nakano, T. Itho et al. · 1990 · 17 citations

, , +7

Digital chemical vapor deposition of SiO2

Masatake Nakano, Hiroyuki Sakaue, Hayami Kawamoto et al. · Applied Physics Letters · 1990 · 13 citations

, , +11

Rows per page

1–3 of 3