1
Publications
17
Citations
1
H-Index
1990
Active since
T. Itho is an author specializing in microelectronics, engineering, and electronic packaging.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationElectronic Packaging
Publications per year
1990–1990
1
1
Silicon Wafer-Bonding Process Technology for SOI Structures
Tomoyuki Abe, Masatake Nakano, T. Itho et al. · 1990 · 17 citations
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