Statistics
Publications
3
Citations
107
H-Index
3
Active since
1990
Affiliations
Hiroshima University(Current)
Kazushi Asami is an author at Hiroshima University specializing in materials science, surface science, and materials engineering.
Publications per year
1990–2015
3
3
Atomic Layer Controlled Digital Etching of Silicon
Hiroyuki Sakaue, Seiji Iseda, Kazushi Asami et al. · Japanese Journal of Applied Physics · 1990 · 86 citations
Digital Process for advanced VLSI's and Surface Reaction Study
Hiroyuki Sakaue, Kazushi Asami, Tsutomu Ichihara et al. · MRS Proceedings · 1991 · 10 citations
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