In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor - Concepedia

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In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

169

Citations

7

References

2008

Year

Uma Krishnamoorthy, Roy H. Olsson, Gregory R. Bogart, Michael Baker, D. W. Carr, Thomas P. Swiler, Peggy J. Clews

Sensors and Actuators A Physical

EngineeringOptical PropertiesApplied PhysicsNano Electro Mechanical SystemMicro-electromechanical SystemSensor TechnologyNanophotonics

References

	Year	Citations

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