Concepedia

M.A. Schmidt

MS

Statistics

Publications

13

Citations

652

H-Index

12

Active since

1993

Affiliations

Massachusetts Institute of Technology(Current)

M.A. Schmidt is an author at Massachusetts Institute of Technology specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMicroelectronicsMechanical EngineeringApplied PhysicsInstrumentationMaterial ScienceElectronic PackagingMicrofluidicsSensor Design

Publications per year

1993–2011

13

Publications

13

Sub-10 cm/sup 3/ interferometric accelerometer with nano-g resolution

Nin C. Loh, M.A. Schmidt, Scott R. Manalis · Journal of Microelectromechanical Systems · 2002 · 108 citations

Engineering, Measurement, Accelerometer +17

Fabrication of wafer-level thermocompression bonds

Christine H. Tsau, S.M. Spearing, M.A. Schmidt · Journal of Microelectromechanical Systems · 2002 · 98 citations

Engineering, Mechanical Engineering, Silicon On Insulator +19

Characterization of Wafer-Level Thermocompression Bonds

Christine H. Tsau, S.M. Spearing, M.A. Schmidt · Journal of Microelectromechanical Systems · 2004 · 97 citations

Pressure Nonuniformity, Engineering, Gold Thin Films +16

High-resolution micromachined interferometric accelerometer

E. B. Cooper, E. Rehmi Post, S. Griffith et al. · Applied Physics Letters · 2000 · 61 citations

Engineering, Measurement, Accelerometer +16

SILICON WAFER BONDING FOR MICROMECHANICAL DEVICES

M.A. Schmidt · 1994 · 45 citations · Full text

Wafer Scale Processing, Engineering, Microfabrication +6

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