CMOS integrated tactile sensor array by porous Si bulk micromachining

A traction stress sensor array for use in high-resolution robotic tactile imaging

B.J. Kane, Mark R. Cutkosky, G.T.A. Kovacs · Journal of Microelectromechanical Systems · 2000 · 232 citations

Medical Electronics, Engineering, Mechanical Engineering +18

A surface micromachined microtactile sensor array

Bonnie L. Gray, Ronald S. Fearing · 2002 · 182 citations

Engineering, Sensor Array, Mechanical Engineering +16

Silicon three-axial tactile sensor

Zhong Chu, P.M. Sarro, S. Middelhoek · Sensors and Actuators A Physical · 1996 · 147 citations

Tactile Sensing, Engineering, Microfabrication +5

Effects of the elastic cover on tactile sensor arrays

Gábor Vásárhelyi, Mária Ádám, É. Vázsonyi et al. · Sensors and Actuators A Physical · 2006 · 47 citations

Tactile Sensing, Engineering, Mechanical Engineering +3

Characterization of an Integrable Single-Crystalline 3-D Tactile Sensor

Gábor Vásárhelyi, M. Ádám, É. Vázsonyi et al. · IEEE Sensors Journal · 2006 · 45 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +19