Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

Measurement of piezoelectric coefficients of ferroelectric thin films

K. Lefki, G. J. M. Dormans · Journal of Applied Physics · 1994 · 586 citations · Full text

Materials Science, Engineering, Ferroelectric Application +11

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 297 citations · Full text

Aluminium Nitride, Engineering, Mechanical Engineering +17

Aluminum nitride : A Versatile bun Challenging Material

Laurel M. Sheppard · American Ceramic Society bulletin · 1990 · 283 citations

Materials Engineering, Materials Science, Aluminium Nitride +5

Piezoelectric coefficient of aluminum nitride and gallium nitride

C. M. Lueng, H. L. W. Chan, C. Surya et al. · Journal of Applied Physics · 2000 · 223 citations · Full text

Materials Science, Semiconductors, Electrical Engineering +13

Quantitative ferroelectric characterization of single submicron grains in Bi-layered perovskite thin films

Cătălin Harnagea, A. Pignolet, Marin Alexe et al. · Applied Physics A · 2000 · 142 citations

Materials Science, Ferroelastics, Engineering +10