Concepedia
Statistics
Publications
14
Citations
1.3K
H-Index
12
Active since
1989
Affiliations
Nitto (Japan)(Current)
National Institute of Advanced Industrial Science and Technology
Denso (United States)
Aichi Institute of Technology
Denso (Japan)
Nobuaki Kawahara is an author at Nitto (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMaterials EngineeringThin FilmsElectrical EngineeringSurface ScienceEnergy HarvestingCondensed Matter PhysicsRobotics
Publications per year
1989–2008
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 994 citations
Materials Science, Materials Engineering, Alloy Thin Films +14
Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films
Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Applied Physics Letters · 2008 · 79 citations
Materials Science, Aluminium Nitride, Oxygen Concentration +10
Influence of sputtering pressure on polarity distribution of aluminum nitride thin films
Toshihiro Kamohara, Morito Akiyama, Naohiro Ueno et al. · Applied Physics Letters · 2006 · 50 citations
Materials Science, Materials Engineering, Aluminium Nitride +12
Polarity inversion in aluminum nitride thin films under high sputtering power
Morito Akiyama, Toshihiro Kamohara, Naohiro Ueno et al. · Applied Physics Letters · 2007 · 42 citations
Materials Science, Materials Engineering, Electrical Engineering +15
Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate
Kazuhiko Kano, Kazuki Arakawa, Yukihiro Takeuchi et al. · Sensors and Actuators A Physical · 2006 · 35 citations
Materials Engineering, Materials Science, Aluminium Nitride +11
1–5 of 14