Publication | Open Access
Sub-bandgap spectral photo-response analysis of Ti supersaturated Si
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Citations
16
References
2012
Year
Optical MaterialsEngineeringIntegrated CircuitsSilicon On InsulatorSemiconductorsOptical PropertiesHigh Dose TiInfrared OpticPulsed Laser DepositionSemiconductor TechnologyPhotonicsPhysicsCrystalline DefectsTi ConcentrationSemiconductor MaterialPhotoelectric MeasurementSemiconductor Device FabricationNatural SciencesSpectroscopyApplied PhysicsSpectral IlluminationOptoelectronics
We have analyzed the increase of the sheet conductance (ΔG□) under spectral illumination in high dose Ti implanted Si samples subsequently processed by pulsed-laser melting. Samples with Ti concentration clearly above the insulator-metal transition limit show a remarkably high ΔG□, even higher than that measured in a silicon reference sample. This increase in the ΔG□ magnitude is contrary to the classic understanding of recombination centers action and supports the lifetime recovery predicted for concentrations of deep levels above the insulator-metal transition.
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