Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences · 1992 · 214 citations · 106 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSemiconductor MaterialsSolid State PhysicsDislocation MechanicsDislocation TheoryDislocations In SemiconductorsSemiconductor PhysicsSemiconductor Thin FilmsStrain EngineeringDislocation NucleationDislocation PropagationDislocationsLattice MismatchLattice Mismatch StrainLattice StrainMisfit DislocationsStrain Relaxation
Abstract This article reviews current experimental and theoretical knowledge of the relaxation of lattice-mismatch strain via misfit dislocations in heteroepitaxial semiconductor films. The energetics and kinetics of misfit dislocation nucleation, propagation, and interaction processes are described in detail. In addition, there is a brief review of the principal properties of dislocations in bulk semiconductors and an outline of existing models for strained layer stability.
106