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Preferentially oriented and amorphous Ti, TiN and Ti/TiN diffusion barrier for Cu prepared by ion beam assisted deposition (IBAD)

DOI

24

Citations

6

References

2002

Year

Kewei Chen, Yuhui Yu, Haichuan Mu, E.Z. Luo, B. Sundaravel, S. P. Wong, I. H. Wilson
Surface and Coatings Technology

References

YearCitations

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