Precision Engineering · 2013 · 24 citations · 9 references
Natural SciencesElectrical EngineeringPhysicsElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsConductive MaterialsElectrical CharacterizationElectrical ConductivityMachiningSemiconductor Device MaterialsSemiconductor PhysicsMachining TechnologySemiconducting CrystalsSemiconductor CharacterizationSemiconductor ConductivitySemiconductor Technology
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Diamond Cutting of Silicon with Nanometric Finish
Fengzhou Fang, V.C. Venkatesh · CIRP Annals · 1998 · 167 citations