Publication | Closed Access
High efficiency slicing of low resistance silicon ingot by wire electrolytic-spark hybrid machining
45
Citations
5
References
2008
Year
Electrical EngineeringEngineeringMicrofabricationMaterial MachiningTool WearMechanical EngineeringLow Resistance SiliconHigh EfficiencyMachine ToolManufacturing EngineeringMicroelectronicsAbrasive Machining
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