Studies on Magnetron Sputtering Assisted by Inductively Coupled RF Plasma for Enhanced Metal Ionization

Abstract

Planar magnetron discharge is assisted by inductively coupled plasmas, which are sustained by a helical RF antenna immersed in the plasma. Use of the technique significantly enhances the plasma density. The effects of antenna termination when grounded or floating have been investigated by a simple circuit analysis. The floating antenna configuration effectively suppresses the anomalous rise of the plasma potential and thus the plasma source can be stably operated at a higher input of RF power to generate plasmas with densities as high as >10 12 cm -3 .