Tatsuo Shoji

Compact Helical System Physics and Engineering Design

K. Nishimura, K. Matsuoka, Masami Fujiwara et al. · Fusion Technology · 1990 · 96 citations

Engineering, Electrical Engineering, Electric Machines +7

Studies on Magnetron Sputtering Assisted by Inductively Coupled RF Plasma for Enhanced Metal Ionization

Masahiro Yamashita, Yuichi Setsuhara, Shoji Miyake et al. · Japanese Journal of Applied Physics · 1999 · 46 citations

Natural Sciences, Electrical Engineering, Physics +14

Production of Inductively-Coupled Large-Diameter Plasmas with Internal Antenna

Yuichi Setsuhara, Shoji Miyake, Yoichi Sakawa et al. · Japanese Journal of Applied Physics · 1999 · 42 citations

Natural Sciences, Electrical Engineering, Physics +17

Al Etching Characteristics Employing Helicon Wave Plasma

Nobuhiro Jiwari, Hiroaki Iwasawa, Akira Narai et al. · Japanese Journal of Applied Physics · 1993 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ion extraction from plasma by using a radio frequency resonant electric field

Tetsuya Matsui, Kazuki Tsuchida, Shinji Tsuda et al. · Physics of Plasmas · 1996 · 28 citations

Natural Sciences, Physics, Plasma Physics +13